【Conference Presentations】The results of joint research with Nagoya University will be presented at the international conference.

September 19,2024

The results of our joint research with Nagoya University, “Development of Killer Defect Automatic Inspection System to Improve Productivity in Semiconductor Manufacturing” will be presented at an International Conference on Semiconductor Manufacturing (ICSCRM2024)
The results of our joint research with Associate professor Shunta Harada (Institute of Materials and Systems for Sustainability), Nagoya University, Tokai National University Organization, will be presented at the Invited Posters session of the international conference on silicon carbide (SiC) and related materials “International Conference on Silicon Carbide and Related Materials”.
This is a report on the evaluation technique for crystal defects in power device SiC wafers by polarized light observation, which is being researched by Mipox and Nagoya University.

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Conference Name：International Conference on Silicon Carbide and Related Materials 2024(ICSRM2024)
Date：Sunday, September 29 - Friday, October 4, 2024
Location：Raleigh Convention Center (North Carolina, USA)

Date of publication：September 30, 2024 (Monday)
subject for presentation：Identification of Threading Mixed Dislocations Having a Large Edge Component Burgers Vector by Polarized Light Observation
author：Shunta Harada, Michio Kawase, Yasutaka Matsubara, Keisuke Seo, Yuya Mizutani, Seiya Mizutani, Seiji Mizutani and Kenta Murayama
Program Details and Abstracts：https://easychair.org/smart-program/ICSCRM2024/2024-09-30.html

ICSCRM 2024

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【Conference Presentations】The results of joint research with Nagoya University will be presented at the international conference.

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