[NewPaper Published]"Nondestructive analysis of threading mixed dislocations in SiC using x-ray topography and birefringence"

Feb 7, 2025

Our new research paper has been published in Journal of Crystal Growth. This is the latest report on the evaluation
technique for crystal defects in power device SiC wafers by polarised light observation and the result of the joint
research with Associate Professor Shunta Harada ,Nagoya University.



 
Journal AIP Advances
Paper Title Nondestructive analysis of threading mixed dislocations in SiC using x-ray topography and birefringence
Author Shunta Harada, Yasutaka Matsubara, Shohei Hayashi, Michio Kawase, Keisuke Seo, Seiya Mizutani,
Yuya Mizutani, Seiji Mizutani, Kenta Murayama
URL https://doi.org/10.1063/5.0238854

*The paper is open access.


Our joint research was supported by the NEDO project to support young researchers (JPNP20004).

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